VACUUM INSTRUMENTATION EXPLAINED

A vacuum measurement instrument is a generic term for measuring equipment for measurement of the gas pressure quantity in a vacuum application. It can be a standalone vacuum pressure transducer with integrated sensor and electronics or it can be a display and power supply unit with a separate passive sensor connected.

There are many types vacuum instruments using different measuring principles and covering different pressure ranges. Common vacuum measuring instruments are:

• Pirani heat-loss
• Cold cathode ionization
• Hot cathode ionization
• Capacitance manometers
• Piezo diaphragm
• Spinning rotor gauge or viscosity gauge

Instrumentation for measurement and control of vacuum gas pressure is used in many industrial and scientific applications.

A vacuum instrument can provide a display read-out, digital value or an analog output signal.