PVD (physical vapor deposition) are sputtering and evaporation processes where materials like aluminum or hard alloys go from a condensed phase to a vapor phase and then condense as a thin film on the object to coat. Coating of materials by use of PVD processes are used in many diverse industries and applications including:
In metal deposition applications the sputtering process often results in particulate contamination of the vacuum process chamber and surrounding equipment. Such particulates will damage vacuum gauges which impacts measurement performance or reduces the life-time of the gauges.
The SmartPirani™ is available with a user-cleanable integrated particulate baffle system specially designed for PVD applications. The baffle system is designed for blocking particulates while ensuring sufficient vacuum gas conductance and prevent clogging of particulates. The innovative baffle feature can increase time between service intervals and increase equipment up-time. Furthermore, the extended range of the SmartPirani™ can in some PVD applications eliminate the need for cold cathode vacuum gauges for base-pressure verification.
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