901P Loadlock Cross Reference
Sens4 offers a series of vacuum transducers that are drop-in compatible with the MKS 901P vacuum transducer.
The recommended MKS 901P equivalent replacement from Sens4 is designed for seamless integration into existing 901P load-lock installations without requiring modifications to cabling, analog pressure signal scaling, setpoint controls, digital communication protocols, or interface compatibility.
Ensure business continuity by qualifying a second source alternative to the MKS 901P Load-lock transducer or qualify our load-lock vacuum measurement solution as your first choice to take advantage of our short lead time, competitive pricing, and best-class performance.
We provide two plug-and-play alternatives to the MKS 901P load-lock vacuum transducer:
VPM-7 SmartPirani™ ATM Transducer
- Delivers comparable functionality to the 901P vacuum transducer with enhanced measurement performance.
- Features true absolute diaphragm measurement from 2 to 1000 Torr combined with high-performance MEMS Pirani vacuum measurement down to 7.5E-7 Torr.
- Includes an atmospheric switch function for precise measurements relative to ambient barometric pressure.


VPM-17 TriCAP™ ATM Transducer
- Integrates a capacitance diaphragm manometer and a piezo diaphragm sensor, providing gas-independent measurement from 5E-3 to 1333 Torr.
- The SmartPirani™ MEMS sensor ensures exceptional zero stability and measurement down to 7.5E-7 Torr.
- Ideal for users seeking a significant performance upgrade over existing 901P applications.
Cross Reference Table
- Vacuum flange mechanical compatibility
- Emulates analog voltage output pressure signal scaling
- Emulates digital communication protocol with extended measuring range
- Comparable relay setpoint functionality
- Connector pin compatibility
- Supply voltage compatibility
- Compatibility with MKS PDR900 power supply and display
- Typical lead time: 1-4 workdays
MKS P/N | Description of Transducer Configuration | Sens4 P/N | Buy Now |
901P-11030 | DN16KF, RS-232, 1VDC/decade, Torr, 3 relays, 15 Pin HD D-sub | ||
901P-12030 | DN16KF, RS-485, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub | ||
901P-21030 | DN25KF, RS-232, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub | ||
901P-22030 | DN25KF, RS-485, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub | ||
901P-41030 | VCR4F, RS-232, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub | ||
901P-42030 | VCR4F, RS-485, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub | ||
901P-11 | DN16KF, RS-232, 1VDC/decade, Torr, 3 relays, 15 Pin HD D-sub | ||
901P-12 | DN16KF, RS-485, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub | ||
901P-21 | DN25KF, RS-232, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub | ||
901P-22 | DN25KF, RS-485, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub | ||
901P-41 | VCR4F, RS-232, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub | ||
901P-42 | VCR4F, RS-485, 1VDC/decade Torr, 3 relays, 15 Pin HD D-sub |
Cross-reference Disclaimer
This 901P cross-reference tool is intended as a guide for users with technical expertise in vacuum gauging technology. The suggested cross-referenced product is based on our best technical assessment of publicly available product information from the other manufacturer at the time of collection.
Please note that the suggested cross-referenced products are not identical, and technical differences may exist. It is the user’s responsibility to evaluate the suitability and compatibility of the recommended Sens4 product for their specific application and environment. We strongly advise reviewing our datasheet and specifications thoroughly before installation and use.
Sens4 assumes no liability for any claims related to product interchange, improper use, incorrect installation, or exposure to gases or liquids that are not compatible with the media-wetted materials specified in the product documentation.
Need Assistance?
For further guidance, technical support, OEM pricing, or information about performance differences and application compatibility, please do not hesitate to contact the Sens4 team.
Popular Vacuum Measurement Products

VPM-15 TriCAP™
All the features and functions of the VPM-5, but now also with capacitance and piezo diaphragm gauge for gas independent measurement from 5E-3 to 1333 mbar.

VPM-7 SmartPirani ATM
The VPM-7 is the choice if you need to combine vacuum measurement and atmospheric switch functionality.
Designed for load-lock control.

TrueVAC™ Controller
Universal 3 channel controller for hassle-free display of measurement pressure data. Combine different vendors gauges.