Vacuum Technology Knowledge

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MEMS Pirani Explained

Understanding the Principles Behind MEMS Pirani Vacuum Gauges and Sensors A MEMS Pirani vacuum sensor, gauge or transducer is a device for measuring vacuum gas pressure by measurement of the pressure ...

MEMS Pirani

Dec 18, 2024 Vacuum Technology

History of the Pirani Vacuum Gauge

From Inception to Innovation: The Evolution and Operating Principles of the Pirani Vacuum Gauge The Pirani vacuum gauge is widely used in industrial and scientific applications to measure gas pressure...

HistoryofScience MEMS Pirani VacuumMeasurement

Dec 18, 2024 Vacuum Technology

What is the Working Principle of the Pirani Gauge

Working Principle of the Pirani Gauge The traditional Pirani vacuum gauge,originally invented in 1906 by Marcello Stefano Pirani ¹, is based on a hot metal wire suspended in a tube that is exposed to ...

MEMS Pirani VacuumMeasurement

Dec 18, 2024 Vacuum Technology

Sens4 Knowledge

We love sharing our knowledge with the vacuum community and our customers. Explore the Sens4 Knowledge Center to learn more about vacuum and pressure measurement technology, as well as related science.

Vacuum Measurement Solutions

vpm-7 loadlock for semiconductor processing tools

VPM-7 SmartPirani™ ATM

An all-in-one modern solution for load-lock pressure control. Drop-in replacement for other vendors legacy load-lock gauges available.

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VDM-5 DiCAP™

Wide range dual diaphragm gauge for gas independent measurement. Analog, digital, and setpoint relays controls options.

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VPM-5 SmartPirani™

Record-breaking Pirani and Diaphragm combination gauge.

Wide selection of interface options.

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