Vacuum Technology Knowledge

8 Articles

Pirani × Nov 2024 ×

Load-lock Pressure Control in the Semiconductor Industry

Technical White Paper By Ole Wenzel , CEO Sens4 A/S Abstract Load-lock systems play a critical role in semiconductor manufacturing by enabling wafer transfer between atmospheric and vacuum environment...

Loadlock MEMS Pirani VacuumMeasurement WhitePaper

Aug 7, 2025 Vacuum Technology

MEMS Pirani Explained

Understanding the Principles Behind MEMS Pirani Vacuum Gauges and Sensors A MEMS Pirani vacuum sensor, gauge or transducer is a device for measuring vacuum gas pressure by measurement of the pressure ...

MEMS Pirani VacuumMeasurement

Dec 18, 2024 Vacuum Technology

History of the Pirani Vacuum Gauge

From Inception to Innovation: The Evolution and Operating Principles of the Pirani Vacuum Gauge The Pirani vacuum gauge is widely used in industrial and scientific applications to measure gas pressure...

HistoryofScience MEMS Pirani VacuumMeasurement

Dec 18, 2024 Vacuum Technology

Heat Loss Vacuum Gauge Explained

WHAT IS A HEAT-LOSS VACUUM GAUGE? A heat-loss vacuum gauge or sensor is a device for measuring vacuum gas pressure by measurement of the pressure dependent thermal conductivity from a heated filament....

Pirani VacuumMeasurement

Dec 18, 2024 Vacuum Technology

Units for Vacuum Pressure Measurement

According to SI (short for Le Système International d'Unités ), the official unit for measuring vacuum gas pressure is the pascal (symbol: Pa ). However, other commonly used pressure units include tor...

Pascal Pirani Torr Unit VacuumMeasurement mbar

Dec 18, 2024 Vacuum Technology

Vacuum Instrumentation Explained

A vacuum measurement instrument is a general term for equipment designed to measure gas pressure within a vacuum environment. These instruments are essential for ensuring accurate pressure control in ...

CDG ColdCathode HotCathode Piezo Pirani

Dec 18, 2024 Vacuum Technology

What is a drop-in replacement Vacuum Gauge?

Drop-in replacement Vacuum Gauge Explained A drop-in replacement refers to a product, component, or system designed to be a direct substitute for another, requiring no or minimal modifications to the ...

CDG CapacitanceDiaphragmGauge Loadlock Piezo Pirani VacuumMeasurement VacuumSwitch

Dec 18, 2024 Vacuum Technology

What is the Working Principle of the Pirani Gauge

Working Principle of the Pirani Gauge The traditional Pirani vacuum gauge,originally invented in 1906 by Marcello Stefano Pirani ¹, is based on a hot metal wire suspended in a tube that is exposed to ...

MEMS Pirani VacuumMeasurement

Dec 18, 2024 Vacuum Technology

Sens4 Knowledge

We love sharing our knowledge with the vacuum community and our customers. Explore the Sens4 Knowledge Center to learn more about vacuum and pressure measurement technology, as well as related science.

Vacuum Measurement Solutions

vpm-7 loadlock for semiconductor processing tools

VPM-7 SmartPirani™ ATM

An all-in-one modern solution for load-lock pressure control. Drop-in replacement for other vendors legacy load-lock gauges available.

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VDM-5 DiCAP transducer

VDM-5 DiCAP™

Wide range dual diaphragm gauge for gas independent measurement. Analog, digital, and setpoint relays controls options.

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VPM-5 SmartPirani vacuum transducer from Sens4

VPM-5 SmartPirani™

Record-breaking Pirani and Diaphragm combination gauge.

Wide selection of interface options.

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