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Load-lock Pressure Control in the Semiconductor Industry

Technical White Paper By Ole Wenzel , CEO Sens4 A/S Abstract Load-lock systems play a critical role in semiconductor manufacturing by enabling wafer transfer between atmospheric and vacuum environment...

Loadlock MEMS Pirani VacuumMeasurement WhitePaper

Aug 7, 2025 Vacuum Technology

Load-lock Explained

A Load-lock is a vacuum chamber used in the vacuum and semiconductor industry for loading devices like semiconductor wafers and transferring the wafers from ambient air pressure conditions to the main...

Loadlock VacuumMeasurement VacuumSwitch

Dec 18, 2024 Vacuum Technology

What is a Solid-State Relay?

Solid-state relays , just like traditional electro-mechanical relays, serve the purpose of providing a reliable switching contact function. However, while electro-mechanical relays rely on physically ...

Loadlock Relay SolidStateRelay

Dec 18, 2024 Process Control

Dry Vacuum Technology Explained

Historically, oil-lubricated vacuum pumps were the predominant type used in many vacuum applications and industries. These pumps, such as rotary vane pumps, rely on oil for the lubrication of moving p...

Loadlock Vacuum pump VacuumMeasurement

Dec 18, 2024 Vacuum Technology

What is a drop-in replacement Vacuum Gauge?

Drop-in replacement Vacuum Gauge Explained A drop-in replacement refers to a product, component, or system designed to be a direct substitute for another, requiring no or minimal modifications to the ...

CDG CapacitanceDiaphragmGauge Loadlock Piezo Pirani VacuumMeasurement VacuumSwitch

Dec 18, 2024 Vacuum Technology

Sens4 Knowledge

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Vacuum Measurement Solutions

vpm-7 loadlock for semiconductor processing tools

VPM-7 SmartPirani™ ATM

An all-in-one modern solution for load-lock pressure control. Drop-in replacement for other vendors legacy load-lock gauges available.

Go To VPM-7 Product Page

VDM-5 DiCAP transducer

VDM-5 DiCAP™

Wide range dual diaphragm gauge for gas independent measurement. Analog, digital, and setpoint relays controls options.

Go To VDM-5 Product Page

VPM-5 SmartPirani vacuum transducer from Sens4

VPM-5 SmartPirani™

Record-breaking Pirani and Diaphragm combination gauge.

Wide selection of interface options.

Go To VPM-5 Product Page

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