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Load-lock Pressure Control in the Semiconductor Industry

Technical White Paper By Ole Wenzel , CEO Sens4 A/S Abstract Load-lock systems play a critical role in semiconductor manufacturing by enabling wafer transfer between atmospheric and vacuum environment...

Loadlock MEMS Pirani VacuumMeasurement WhitePaper

Aug 7, 2025 Vacuum Technology

MEMS Pirani Explained

Understanding the Principles Behind MEMS Pirani Vacuum Gauges and Sensors A MEMS Pirani vacuum sensor, gauge or transducer is a device for measuring vacuum gas pressure by measurement of the pressure ...

MEMS Pirani VacuumMeasurement

Dec 18, 2024 Vacuum Technology

History of the Pirani Vacuum Gauge

From Inception to Innovation: The Evolution and Operating Principles of the Pirani Vacuum Gauge The Pirani vacuum gauge is widely used in industrial and scientific applications to measure gas pressure...

HistoryofScience MEMS Pirani VacuumMeasurement

Dec 18, 2024 Vacuum Technology

Heat Loss Vacuum Gauge Explained

WHAT IS A HEAT-LOSS VACUUM GAUGE? A heat-loss vacuum gauge or sensor is a device for measuring vacuum gas pressure by measurement of the pressure dependent thermal conductivity from a heated filament....

Pirani VacuumMeasurement

Dec 18, 2024 Vacuum Technology

Capacitance Diaphragm Gauge Explained

A Capacitance Diaphragm Gauge (CDG) measures vacuum gas pressure by directly measuring the applied force on the surface of a thin diaphragm. A traditional capacitance vacuum transducer measures absolu...

CDG CapacitanceDiaphragmGauge VacuumMeasurement

Dec 18, 2024 Vacuum Technology

What is a Vacuum Switch?

A vacuum switch is an electronic or mechanical device that provides an electrical switching contact function at a defined vacuum gas pressure level. It is used in many vacuum applications for pressure...

VacuumMeasurement VacuumSwitch

Dec 18, 2024 Vacuum Technology

Load-lock Explained

A Load-lock is a vacuum chamber used in the vacuum and semiconductor industry for loading devices like semiconductor wafers and transferring the wafers from ambient air pressure conditions to the main...

Loadlock VacuumMeasurement VacuumSwitch

Dec 18, 2024 Vacuum Technology

RS-232 and RS-485 Differences

RS-232 andRS-485 DifferencesExplained RS-232 and RS-485 are standards for serial interfaces that each specify the transmission media and a defined set of logic levels, data rates and timings. These ar...

RS-232 RS-485 VacuumMeasurement

Dec 18, 2024 Process Control

Units for Vacuum Pressure Measurement

According to SI (short for Le Système International d'Unités ), the official unit for measuring vacuum gas pressure is the pascal (symbol: Pa ). However, other commonly used pressure units include tor...

Pascal Pirani Torr Unit VacuumMeasurement mbar

Dec 18, 2024 Vacuum Technology

What is Reverse Polarity Protection?

Accidents and mistakes during equipment installation or maintenance, such as reversing the polarity of a DC power supply connected to a pressure, vacuum, or temperature transducer or transmitter, can ...

PressureMeasurement Transmitter VacuumMeasurement VacuumSwitch

Dec 18, 2024 Process Control

Spinning Rotor Gauge Explained

Spinning Rotor Gauges , commonly referred to as SRG or viscosity gauges, measure the pressure-dependent molecular drag on a magnetically levitated spinning steel ball. During the SRG vacuum measuremen...

SRG VacuumMeasurement

Dec 18, 2024 Vacuum Technology

Dry Vacuum Technology Explained

Historically, oil-lubricated vacuum pumps were the predominant type used in many vacuum applications and industries. These pumps, such as rotary vane pumps, rely on oil for the lubrication of moving p...

Loadlock Vacuum pump VacuumMeasurement

Dec 18, 2024 Vacuum Technology

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Vacuum Measurement Solutions

vpm-7 loadlock for semiconductor processing tools

VPM-7 SmartPirani™ ATM

An all-in-one modern solution for load-lock pressure control. Drop-in replacement for other vendors legacy load-lock gauges available.

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VDM-5 DiCAP transducer

VDM-5 DiCAP™

Wide range dual diaphragm gauge for gas independent measurement. Analog, digital, and setpoint relays controls options.

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VPM-5 SmartPirani vacuum transducer from Sens4

VPM-5 SmartPirani™

Record-breaking Pirani and Diaphragm combination gauge.

Wide selection of interface options.

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